Head slider and disk drive employing same head slider, and method for providing water repellent treatment to same head slider

ABSTRACT

With a view to providing a head slider which can suppress the adhesion of dust particles to a flying surface of the head slider when the head slider flies and a disk drive employing the same head slider, a head slider in which at least an air bearing portion and a land portion for forming a vacuum area on the flying surface are provided on the flying surface of the head slider, the land portion being formed in such a manner as to have a difference in level so as to be closer by a step to a disk medium than an end surface of the slider base, wherein the water repellency of an end surface of the land portion and the water repellency of the end surface of the slider base are made higher than the water repellency of the air bearing portion. As this occurs, the water repellency of the end surface of the land portion is increased more than the water repellency of the air bearing portion, whereby the water repellency of the end surface of the slider base can be increased more than the water repellency of the end surface of the land portion.

CROSS-REFERENCE TO RELATED APPLICATIONS

This is a divisional of application Ser. No. 10/436,188, filed May 12,2003, which is a continuation of PTCT/JP00/08135, filed Nov. 17, 2000.

FIELD OF THE INVENTION

The present invention relates to a head slider and a disk driveemploying the same head slider, a method for providing a water repellenttreatment to the head slider and, more particularly, to a head sliderwhich can reduce a sticking force or a stiction resulting from thecontact of the head slider with a magnetic recording medium when amagnetic disk drive starts up or stops and a disk drive employing thesame head slider, and a method for providing a water repellent treatmentto the head slider.

DESCRIPTION OF RELATED ART

In recent years, as magnetic disk drives have been made smaller in sizewhile their capacities have been increased, various innovativetechnologies have been introduced in order to provide faster and morereliable magnetic disk drives. In addition, similar technologyinnovations have been demanded for disk media to or from which data iswritten or read.

Incidentally, as the magnetic disk drives have been made smaller in sizewhile their capacities have been increased, flying heights of headsthereof have been decreased, and as the flying heights of the heads havebeen so decreased, the surfaces of disk media have been made smoother.The head is mounted on a distal end portion of a head slider and is madeto fly above a disk medium, by the slider, with an extremely small gaprelative to the disk medium while a magnetic disk drive is in operation,whereby the head so positioned writes or reads data to or from the diskmedium.

In conventional head sliders, a step-like difference in level isprovided on the flying surface (a surface facing a disk medium) of thehead slider in order to reduce the flying amount of the head sliderabove the disk medium, and a vacuum area is formed on the flying surfaceby this difference in level. However, dust particles, composed of amaterial such as a liquid lubricant, tend to adhere to the vacuum areaon the head slider, and since there may be caused a risk that the dustparticles so adhering to the vacuum area drop onto the head medium tothereby trigger a head crash, countermeasures against the risk have beendesired.

A head of the conventional magnetic disk drive for writing or readingdata to or from a disk medium is mounted on the head slider. The headslider is supported by a head suspension, and when the head writes orreads data to or from the disk medium the head performs such writing orreading operation with the head slider being kept in the flyingcondition above the disk medium.

Due to this, air bearing portions and land portions are provided(normally, both the air bearing portions and the land portions areprovided in plural numbers) on the flying surface of the head sliderabove the disk medium (a bottom surface of a slider base) forappropriately maintaining the flying posture of the head slider in theflow of air produced when the disk medium rotates. In addition, in theconventional head sliders, a water repellent treatment was normallyprovided only to the surface of the air bearing portion which issituated closest to the disk medium.

However, conventionally, a vacuum generating area is provided at acentral portion of the bottom surface of the slider base to reduce theflying amount of the head slider above the disk medium, and since nowater repellent treatment is provided, in general, to this vacuumgenerating area, there has been caused a problem that dust particlestend to easily adhere to the central portion of the bottom surface ofthe slider base. Namely, dust particles constituted by a material suchas a liquid lubricant adhere to accumulate on the vacuum generating areaof the head slider as the head slider performs such operations ascontact start and stop (CCS), and seek in the magnetic disk drive and,in the event that the amount of dust particles so accumulated on thevacuum generating area exceeds an allowable amount, then there is causeda problem that some of the dust particles so adhering drop onto thesurface of the disk medium to thereby trigger a head crash.

SUMMARY OF THE INVENTION

Then, an object of the present invention is to provide a head slider anda disk drive employing the same head slider, and a method for providinga water treatment to the head slider, the head slider being an improvedhead slider in which at least a step-like stepped portion is provided ona slider base of a head slider so as to reduce the flying amount of thehead slider in order to allow the provision of a disk drive having ahigher density, wherein the adhesion of dust particles to a flyingsurface of the head slider when the head slider flies can be suppressed.

The present invention which can attain the above object is described inthe form of the following embodiments.

According to a first embodiment of a head slider of the invention, thereis provided a head slider comprising a plurality of flat steps formed atan air inlet end of a flying surface of the head slider accessing a diskmedium which faces the disk medium in such a manner as to be steppedgradually from a slider base and a vacuum area formed on the flyingsurface of the head slider which faces the disk medium at a downstreamend of an air flow flowing through the steps, wherein at least a groovefor introducing air to the vacuum area is formed in the step having alongest distance from the slider base in such a manner that the depth ofthe groove so formed reaches at its maximum the surface of the stephaving a second longest distance from the slider base.

According to a second embodiment of a head slider of the invention,there is provided a head slider as set forth in the first embodiment ofthe invention in which the plurality of steps comprise a first step anda second step which is formed on a side which allows the second step tobe closer to the disk medium by one step than the first step, in whichend portions of the first step are extended toward the downstream end ofthe air flow so as to form rail portions, in which a land portioncomprising a plurality of flat steps is formed further at a downstreamend of each of the rail portions, and in which a third step which is thestep of the steps formed on each of the land portions which is situatedclosest to the disk medium has the same height as that of the secondstep, wherein a water repellency provided to the second and third stepscan be increased higher than water repellencies provided to otherportions of the flying surface.

According to a third embodiment of the invention, there is provided ahead slider in which at least a land portion is provided on a flyingsurface of the head slider accessing a disk medium for forming a vacuumarea on the flying surface, the land portion comprising at least a flatstep formed thereon in such a manner as to be gradually closer to thedisk medium than a slider base, wherein water repellencies provided toother portions of the flying surface are increased to higher than awater repellency provided to the step situated at a position having alongest distance from the slider base.

In the first to third embodiments, a porous polymer layer can beprovided at an end portion of an air outlet end of the head slider.

With a view to attaining the aforesaid object, a magnetic disk driveaccording to the invention adopts a head slider as set forth in thefirst to third aspects of the invention.

In this disk drive, a head cleaning mechanism can be provided in thevicinity of a CSS zone or a loading and unloading area where the headslider comes to rest for fixing the head slider in the CSS zone orloading and unloading area and wiping off dirt adhering to the endportion of the air outlet end of the head slider.

With a view to attaining the aforesaid object, according to a firstembodiment of a method of the invention for providing a water repellenttreatment to the head slider, in forming the steps utilizing aphotolithography technique, a water repellent treatment is provided tothe surface of the head slider with an RIE using a fluorine reaction gasin a state in which a shielding resist is left immediately after avacuum generating area has been formed by an ion mill.

In addition, with a view to attaining the aforesaid object, according toa second embodiment of a method of the invention for providing a waterrepellent treatment to the head slider in which a protection film isprovided on the steps, and in which part of the protection film isremoved using the photolithography technique, wherein a water repellenttreatment is provided to portions of the head slider other than theuppermost step at the same time as part of the protection film isremoved with a RIE using a fluorine reaction gas.

According to the invention, there can be provided the head slider whichcan suppress the adhesion of dust particles to the flying surface of thehead slider when it flies and the disk drive employing the head slider,and the method for providing a water repellent treatment to the headslider.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other objects, features and advantages of the presentinvention will be described in detail below according to embodimentsshown in the accompanying drawings, wherein,

FIG. 1 is a plan view showing the general construction of a disk drive.

FIG. 2A is a bottom view of a conventional head slider for use in thedisk drive.

FIG. 2B is a perspective view of the head slider shown in FIG. 2 asviewed from a head side.

FIG. 3A is a perspective view of a head slider according to a firstexample of a first embodiment of the present invention as viewed from abottom side.

FIG. 3B is a bottom view of the head slider shown in FIG. 3A.

FIG. 4A is a bottom view of a head slider according to a second exampleof the first embodiment of the present invention.

FIG. 4B is a perspective view of the head slider shown in FIG. 4A asviewed from a bottom side.

FIG. 5A is a bottom view of a head slider according to a first exampleof a second embodiment of the present invention.

FIG. 5B is a perspective view of the head slider shown in FIG. 5A asviewed from a bottom side.

FIG. 6A is a bottom view of a head slider according to a first exampleof a third embodiment of the present invention.

FIG. 6B is a bottom view of a head slider according to a second exampleof the third embodiment of the present invention.

FIG. 7A is a bottom view of a head slider according to a first exampleof a fourth embodiment of the present invention.

FIG. 7B is a bottom view showing a vacuum distribution on a flyingsurface of the head slider shown in FIG. 7A when the head slider flies.

FIG. 8A is a bottom view of a head slider according to a second exampleof the fourth embodiment of the present invention.

FIG. 8B is a bottom view showing a vacuum distribution on a flyingsurface of the head slider shown in FIG. 8A when the head slider flies.

FIG. 9A is a perspective view of a head slider according to a firstexample of a fifth embodiment of the present invention as viewed from abottom side.

FIG. 9B is a perspective view of a head slider according to a secondexample of the fifth embodiment of the present invention as viewed froma bottom side.

FIG. 9C is a perspective view of a head slider according to a thirdexample of the fifth embodiment of the present invention as viewed froma bottom side.

FIG. 10A is a bottom view of a head slider according to a sixthembodiment of the present invention.

FIG. 10B is a perspective view of the head slider shown in FIG. 10A asviewed from a bottom side.

FIG. 11 is a partial perspective view of a characteristic portion of ahead slider according to a seventh embodiment of the present inventionas viewed from a bottom side.

FIG. 12 is a partial perspective view of a characteristic portion of ahead slider according to an eighth embodiment of the present inventionas viewed from a bottom side.

FIG. 13 is a partial perspective view of a characteristic portion of ahead slider according to a ninth embodiment of the present invention asviewed from a bottom side.

FIG. 14 is a partial perspective view of a characteristic portion of ahead slider according to a tenth embodiment of the present invention asviewed from a bottom side.

FIG. 15 is a partial perspective view of a characteristic portion of ahead slider according to an eleventh embodiment of the present inventionas viewed from a bottom side.

FIG. 16 is a partial perspective view of a characteristic portion of ahead slider according to a twelfth embodiment of the present inventionas viewed from a bottom side.

FIG. 17 is an explanatory view showing the basis of the construction ofa head slider according to a thirteenth embodiment of the presentinvention, which includes a bottom view of the head slider.

FIG. 18 is a partial perspective view of a characteristic portion of ahead slider according to a fourteenth embodiment of the presentinvention as viewed from a bottom side.

FIG. 19 is a partial perspective view of a characteristic portion of ahead slider according to a fifteenth embodiment of the present inventionas viewed from a bottom side.

FIG. 20 is a perspective view showing the construction of a cleaningmechanism for removing the dirt of the head slider of a disk driveaccording to the present invention.

FIGS. 21A to 21D are explanatory views explaining the operations of thecleaning mechanism of the head slider shown in FIG. 20, wherein FIG. 21Ais an explanatory view showing a state in which the head slider issituated above a disk medium, FIG. 21B is an explanatory view showing astate in which the head slider is moved in a circumferential directionof the disk medium, and a guide bar provided on the head slider rides ona guide slope, FIG. 21C is an explanatory view showing a state in whichthe head slider is being cleaned with a cleaning roller at a cleaningposition, and FIG. 21D is a partial side view of FIG. 21C.

FIG. 22 is a process diagram explaining the steps of a conventionalprocess for providing a water repellent treatment to a bottom surface ofa head slider.

FIG. 23 is a process diagram showing the steps of a first embodiment ofa process for providing a water repellent treatment to a bottom surfaceof a head slider according to the present invention.

FIG. 24 is a process diagram showing the steps of a second embodiment ofa process for providing a water repellent treatment to a bottom surfaceof a head slider.

FIG. 25 is a process diagram explaining the steps of a conventionalprocess for providing a water repellent treatment to a bottom surface ofa head slider in case where an adsorption preventing recessed portion isnot created in a protection film.

FIG. 26 is a process diagram showing the steps of a first embodiment ofa process for providing a water repellent treatment to a bottom surfaceof a head slider according to the present invention in case where anadsorption preventing recessed portion is not created in a protectionfilm.

BEST MODE FOR CARRYING OUT THE INVENTION

Before embodiments of the present invention are described in detail,based on specific examples with reference to the accompanying drawings,the problems inherent in a head slider of a conventional disk drive willbe described with reference to the drawings.

FIG. 1 shows the general construction of a conventional magnetic diskdrive 10. In the magnetic disk drive 10, a spindle motor 12 is providedin a housing 11 of the magnetic disk drive 10, and at least a magneticdisk medium 13 is attached to the spindle motor 12. The magnetic diskmedium 13 is intended to record data thereon, and a head attached to ahead slider 1 reads data recorded on the disk medium 13 therefrom andwrites data to the disk medium 13. The number of head sliders 1corresponds to the number of disk media 13.

The head slider 1 is supported by a head suspension 14 and isconstructed to move in radial directions shown in arrows over the diskmedium 13. When the head on the head slider 1 operates to performreading data from the disk medium 13 or writes data to the disk medium13, the head slider 1 performs the data reading or data writingoperation while it is flying above the disk medium 13. The headsuspension 14 is mounted on a carriage 16 which can swing around arotating shaft 15. A coil is provided on the carriage 16 on an oppositeside to the side thereof where the head suspension 14 is mounted, andthis coil is adapted to be driven by a voice coil motor 17.

FIGS. 2A and 2B show the construction on a bottom side of theconventional head slider 1 for use in a magnetic disk drive 10 asdescribed in FIG. 1. The head slider 1 is constituted by a slider base 2and a head unit 3 mounted on the head slider base 2. The slider base 2is formed from ferrite. Additionally, in this embodiment, a head 4provided on the head unit 3 is a composite head comprising a GMR headand an inductive head.

A substantially portal-type first land portion 21 is provided on a sideof the slider base 2 which confronts the disk medium at an air inlet endof the slider base 2 where air is let in when the disk medium rotates,and second and third land portions 22, 23 are provided on the same sideof the slider base 2 at an air outlet end thereof. The heights of thesurfaces of the first to third land portions 21 to 23 which confront thedisk medium (hereinafter, referred to as end surfaces) from the sliderbase 2 are identical. In addition, a first air bearing portion 31 isprovided on the end surface of the first land portion 21, a second airbearing portion 32 is provided on the end surface of the second landportion 22, and a third air bearing portion 33 is provided on the endsurface of the third land portion 23. End surfaces of the first to thirdair bearing portions 31 to 33 are flat, and the heights thereof from theslider base 2 are identical. Furthermore, a pad 5 is provided at each offour corners of the first land portion 21 in such a manner as toprotrude upwardly therefrom. These four pads 5 are intended to reduce astationary friction force produced between the head slider 1 and thedisk medium when the head slider 1 rests on a disk medium which hasstopped rotating. Consequently, the heights of the four pads 5 areidentical.

The head unit 3 is constituted by a base portion 3B which issuperimposed on the slider base 2, a head portion 6 which is provided onthe base portion 3B in such a manner that most of the head portion 6 isoverlaid on the second land portion 22 and the second air bearingportion 23, and a dummy head portion 7 which is also provided on thebase portion 3B in such a manner that most of the dummy head portion 7is overlaid on the third land portion 23 and the third air bearing 33.End faces of the head portion 6 and dummy head portion 7 are flat andare made lower by a step than the end surfaces of the second air bearingportion 32 and third air bearing portion 33, respectively.

In the conventional head slider 1, a water repellent treatment wasprovided on only the end surfaces of the first, second and third airbearing portions 31, 32 and 33.

Conventionally, however, in order to reduce the flying amount of thehead slider 1 above the disk medium, the surface of the slider base 2surrounded by the first to third land portions 21 to 23 constitutes avacuum generating area due to an air flow produced when the head slider1 flies above the disk medium and, as no water repellent treatment wasprovided to this vacuum generating area, there used to be caused aproblem that dust particles tend to adhere to the vacuum generatingarea. Namely, as the head slider performs contact, start, stop (CCS) andseek operations, dirt resulting from a liquid lubricant adheres toaccumulate on the vacuum generating area of the head slider, and in theevent that the amount of dirt so accumulated exceeds an allowableamount, there is caused a problem that part of the dirt so adheringdrops onto the surface of the disk medium, thereby triggering a headcrash.

FIGS. 3A, 3B show a head slider 111 according to a first example of afirst embodiment of the present invention. In the head slider 111 ofthis embodiment, two flying rails 51, 52 are provided in the vicinity ofsides of a surface (an end surface) 58 of a slider base 50 whichconfronts a disk medium, and a land portion 53 is provided between theflying rails 51, 52 at an air inlet end. The flying rails 51, 52 and theland portion 53 have the same heights above the slider base 50, and theend faces thereof are flat. Then, as is the case with the conventionalhead slider, a water repellent treatment is applied to the end surfacesof the flying rails 51, 52 and the land portion 53. In addition, an ovalcolumn-like pad 54 and a column-like pad 55 are provided on each of theflying rails 51, 52. Furthermore, a head portion 56 is provided on theflying rail 51 at an air outlet end, and a dummy head portion 57 isprovided on the flying rail 52 at the air outlet end.

In the head slider 111 according to the first example of the firstembodiment of the present invention which is constructed as has beendescribed heretofore, a water repellent treatment is applied to hatchedareas with dots on the end surface 58 of the slider base 50 (areasexcluding the flying rails 51, 52 and the land portion 53). This waterrepellent treatment increases the water repellency of the end surface 58of the slider base 50 to higher than the water repellency applied to theend surfaces of the flying rails 51, 52 and the land portion 53. Namely,the end surface 58 of the slider base 50 is given a higher waterrepellency than the water repellency on the end surfaces of the flyingrails 51, 52 and the land portion 53.

Thus, in the event that the higher water repellency than the waterrepellency on the end surfaces of the flying rails 51, 52 and the landportion 53 is given to the end surface 58 of the slider base 50, avacuum is produced on the end surface of the slider base 50 when thehead slider 111 flies, and even in the event that suspending liquidlubricant is carried to the end surface 58 of the slider base 50 by theflow of air, the adhesion of the lubricant is prevented by the waterrepellency so given.

FIGS. 4A, 4B show a head slider 112 according to a second example of thefirst embodiment of the present invention. Since the externalconstruction of the head slider 112 of this embodiment looks completelyidentical to the construction of the conventional head slider 1described with reference to FIG. 2, like reference numerals are given tolike constituent members, and the description thereof will be omitted. Awater repellent treatment is provided to end surfaces of first to thirdair bearing portions 31 to 33 of the head slider 112 of this embodimentas in the case with the conventional example.

In the head slider 112 according to the second example of the firstembodiment of the present invention which is constructed as has beendescribed above, a water repellent treatment is provided to end surfaces18 of first to third land portions 21 to 23 and an end surface 28 (anarea excluding the first to third air bearing portions 31 to 33) of theslider base 2, as illustrated by dots. Then, this water repellenttreatment increases the water repellency on the end surfaces 18 of thefirst to third land portions 21 to 23 and the end surface 28 of theslider base 2 higher than the water repellency provided to the endsurfaces of the first to third air bearing portions 31 to 33. Namely, ahigher water repellency than that provided to the end surfaces of thefirst to third air bearing portions 31 to 33 is provided to the endsurfaces 18 of the first to third land portions 21 to 23 and the endsurface 28 of the slider base 2.

Thus, in the event that the higher water repellency than the waterrepellency on the end surfaces of the first to third air bearingportions is given to the end surfaces 18 of the first to third landportions 21 to 23 and the end surface 28 of the slider base 2, a vacuumis produced on the end surface 28 of the slider base 2 when the headslider 112 flies above the disk medium, and even in the event thatsuspending liquid lubricant is carried to the end surface 28 of theslider base 2 by the flow of air, the adhesion of the lubricant to theend surfaces 18 of the first to third land portions 21 to 23 and the endsurface 28 of the slider base 2 is prevented by virtue of the waterrepellency so given.

FIGS. 5A, 5B show the construction of a head slider 120 according to anexample of a second embodiment of the present invention. As the externalconstruction of the head slider 120 of this example looks completelyidentical with the construction of the conventional head slider 1described with reference to FIGS. 2A, 2B, like reference numerals aregiven to like constituent members, and the description thereof will beomitted. As in the case with the conventional example, a water repellenttreatment is provided to end surfaces of first to third air bearingportions 31 to 33 of the head slider 120 of this example.

In the head slider 120 according to the second embodiment of the presentinvention which is constructed as has been described above, as in thecase with the head slider 112 according to the second example of thefirst embodiment, a water repellent treatment is provided to endsurfaces of first to third land portions 21 to 23 and an end surface 28of a slider base 2.

The head slider 120 according to the second embodiment of the presentinvention differs from the head slider 112 according to the secondexample of the first embodiment in that, due to the water repellenttreatment so given, the water repellency on the end surfaces 18 of thefirst to third land portions 21 to 23 is made higher than the waterrepellency provided to the end surfaces of the first to third airbearing portions 31 to 33 and, furthermore, in that the water repellencyon the end surface 28 of the slider base 2 is made higher than the waterrepellency on the end surfaces 18 of the first to third land portions 21to 23. Namely, the water repellencies on the end surfaces of the firstto third air bearing portions 31 to 33, the end surfaces 18 of the firstto third land portions 21 to 23 and the end surface 28 of the sliderbase 2 of the head slider 120 according to the second embodiment aremade higher in that order. Namely, in the head slider 120 according tothe second embodiment, the water repellency of the end surface 28 of theslider base is made to be the highest.

Thus, in the event that the water repellency on the end surface 28 ofthe slider base 2 is made to be the highest, a vacuum is produced on theend surface 28 of the slider base 2 when the head slider 112 flies abovethe disk medium, and even in the event that suspending liquid lubricantis carried to the end surface 28 of the slider base 2 by the flow ofair, the adhesion of the lubricant to the end surface 28 of the sliderbase 2 is prevented further by virtue of it having the highest waterrepellency.

FIG. 6A shows the construction of a head slider 131 according to a firstexample of a third embodiment of the present invention, and FIG. 6Bshows the construction of a head slider 132 according to a secondexample of the third embodiment of the present invention. As the headslider 131 according to the first example of the third embodimentdiffers from the head slider 111 according to the first example of thefirst embodiment only in the manner in which a water repellent treatmentis provided and is identical with the head slider 111 in the remainingportions of the construction thereof, like reference numerals are givento like constituent members, and the description thereof will beomitted. In addition, as the head slider 132 according to the secondexample of the third embodiment differs from the head slider 112according to the second example of the first embodiment only in themanner in which a water repellent treatment is provided and is identicalwith the head slider 111 in the remaining portions of the constructionthereof, like reference numerals are given to like constituent members,and the description thereof will be omitted.

The head slider 131 according to the first example of the thirdembodiment differs from the head slider 111 according to the firstexample of the first embodiment in that the intensity of water repellenttreatment is caused to vary. The water repellent treatment is provideduniformly to the end surface 58 of the slider base 50 of the head slider111 according to the first example of the first embodiment. On the otherhand, an end surface 58 of a slider base 50 of the head slider 131according to the first example of the third embodiment is divided intothree areas such as an area 58A, an area 58B and an area 58C as viewedfrom an air inlet side. Boundary lines between the three areas 58A, 58B,58C are made normal relative to the flow of air, and the waterrepellency is intensified in the following order;

-   -   flying rails 51, 52<the area 58C<the area 58B<the area 58A.

This water repellent treatment increases the water repellency on the endsurface 58 of the slider base 50 most at an air inlet end. Namely, thewater repellency of the end surface 58 of the slider base 50 is made thehighest at the area to which the lubricating oil adheres most easily. Asa result, the effectiveness of the prevention of the adhesion oflubricating oil to the end surface 58 of the slider base 50 isincreased.

The head slider 132 according to the second example of the thirdembodiment differs from the head slider 112 according to the secondexample of the first embodiment in that the intensity of waterrepellency is made to vary. In the head slider 112 according to thesecond example of the first embodiment, the water repellent treatment isprovided uniformly to the end surface 28 of the slider base 2. On theother hand, in the head slider 132 according to the second example ofthe third embodiment, an end surface 28 of a slider base 2 is dividedinto three areas such as an area 28A, an area 28B and an area 28C.Boundary lines between the three areas 28A, 28B and 28C are made normalrelative to the flow of air, and the water repellency is intensified inthe following order;

-   -   air bearing portions 31 to 33<the area 28C<the area 28B<the area        28A.

The water repellency of end surfaces of first to third land portions 21to 23 may be made to be equal to the water repellency of the area 28C orto be an intermediate value between the water repellency of the airbearing portions 31 to 33 and the area 28C.

This water repellent treatment increases the water repellency on the endsurface of the slider base 2 highest at an air inlet end. Namely, thewater repellency of the end surface 28 of the slider base 2 is madehighest at the area to which the lubricating oil adheres most easily. Asa result, the effectiveness of prevention of the adhesion of lubricatingoil to the end surface 28 of the slider base 2 is increased.

FIG. 7A shows the construction of a head slider 141 according to a firstexample of a fourth embodiment. As the head slider 141 according to thefirst example of the fourth embodiment differs from the head slider 111according to the first example of the first embodiment only in themanner in which a water repellent treatment is provided and is identicalwith the head slider 111 in the remaining portions of the constructionthereof, like reference numerals are given to like constituent members,and a description thereof will be omitted.

The head slider 141 according to the first example of the fourthembodiment differs from the head slider 111 according to the firstexample of the first embodiment in that the intensity of waterrepellency is made to vary. In the head slider 111 according to thefirst example of the first embodiment, the water repellent treatment isprovided uniformly to the end surface 58 of the slider base 50, while inthe head slider 141 according to the first example of the fourthembodiment, the water repellency on an end surface 58 of a slider baseat an area 58M held between flying rails 51, 52 is made to vary inaccordance with a vacuum distribution generated in this area when thehead slider 141 flies.

FIG. 7B shows a vacuum distribution generated at the area 58M heldbetween the flying rails 51, 52 on the end surface 58 of the slider base50 while the head slider 141 is flying in the CSS zone in a state inwhich a disk medium rotates at steady speeds. A vacuum generated at thearea 58M becomes maximum at a downstream end of a land portion 53 andbecomes smaller toward upstream or downstream of this downstream end ofthe land portion 53.

Consequently, in the slider head 141 according to the first example ofthe fourth embodiment, the water repellency becomes higher where thevacuum generated between the area 58M held between the flying rails 51,52 on the end surface 58 of the slider base 50 becomes larger. As thisoccurs, the water repellency at a location where the vacuum generated inthe area 58M becomes minimum, and the water repellency of positions onthe end surface 58 of the slider base 50 which are situated outside theflying rails 51, 52 may be equal to or greater than the water repellencyon end surfaces of the flying rails 51, 52.

Due to this water repellent treatment, the water repellency on the endsurface 58 of the slider base 50 is made to vary according to themagnitude of a vacuum generated thereat, i.e., in such a manner that therepellency is intensified as the vacuum is increased. Namely, the waterrepellency is made to become highest at the area to which lubricatingoil adheres most easily. As a result, the effectiveness of prevention oflubricating oil to the end surface 58 of the slider base 50 isincreased.

FIG. 8A shows the construction of a head slider 142 according to asecond example of the fourth embodiment. Since the head slider 142according to the second example of the fourth embodiment differs fromthe head slider 112 according to the second example of the firstembodiment only in the manner in which a water repellent treatment isprovided and is identical with the head slider 112 in the remainingportions of the construction thereof, like reference numerals are givento like constituent members, and a description thereof will be omitted.

The head slider 142 according to the second example of the fourthembodiment differs from the head slider 112 according to the secondexample of the first embodiment in that the intensity of waterrepellency is made to vary. In the head slider 112 according to thesecond example of the first embodiment, the water repellent treatment isprovided uniformly to the end surface 28 of the slider base 2, while inthe head slider 142 according to the second example of the fourthembodiment, the water repellency at a vacuum generating area 28M at adownstream end of a first land portion 21 on an end surface 28 of aslider base 2 is made to vary according to a vacuum distributiongenerated at this area when the head slider 142 flies.

FIG. 8B shows a vacuum distribution generated at the vacuum generatingarea 28M at the downstream end of the first land portion 21 of theslider base 2 when the head slider 142 flies, in the CSS zone, in astate in which a disk medium rotates at a steady speed. A vacuumgenerated in the area 28M is made to become a maximum in the vicinity ofa downstream end of the first land portion 21 and to become smallertoward downstream of this downstream end of the first land portion 21.

Consequently, in the slider head 142 according to the second example ofthe fourth embodiment, the water repellency becomes higher where thevacuum generated at the vacuum generating area 28M at the downstream endof the first land portion 21 on the end surface 28 of the slider base 2becomes larger. As this occurs, the water repellency of a portion wherethe vacuum generated in the area 28M becomes minimum, the waterrepellency of portions of the end surface 28 of the slider base 2 whichare situated outside the first to third land portions 21 to 23, and thewater repellency on end surfaces 18 of the first to third land portions21 to 23 may be equal to or greater than the water repellency on endsurfaces of first to third air bearing portions 31 to 33.

Due to this water repellent treatment, the water repellency on the endsurface 28 of the slider base 2 is made to vary according to themagnitude of a vacuum generated thereat, i.e., in such a manner that therepellency is intensified as the vacuum is increased. Namely, the waterrepellency is made to become highest at the area to which lubricatingoil adheres most easily. As a result, the effectiveness of prevention oflubricating oil to the end surface 28 of the slider base 2 is increased.

FIG. 9A shows the construction of a head slider 151 according to a firstexample of a fifth embodiment of the present invention. Since the headslider 151 according to the first example of the fifth embodimentdiffers from the head slider 111 according to the first example of thefirst embodiment only in that a porous polymer member 59 is provided atan air outlet end thereof and is identical with the head slider 111 inthe remaining portions of the construction thereof, like referencenumerals are given to like constituent members, and the descriptionthereof will be omitted.

In the head slider 151 according to the first example of the fifthembodiment, the porous polymer member 59 is attached to an end face of aslider base 50 at an air outlet end thereof. In this head slider 151, awater repellent treatment is provided to an end surface 58 held betweenflying rails 51, 52, and hence the end surface 58 has the waterrepellency. Due to this, dust particles (liquid lubricant) flowingtogether with air over the end surface are allowed to flow over the endsurface 58 without adhering thereto and flows out from an air outlet endof the slider base 50. While the dust particles may be dispersed over adisk medium as they are, in case the dust particles are forciblytrapped, a risk that the dust particles adhere to the surface of thedisk medium is eliminated. The porous polymer member 59 is intended toadsorb dust particles so that the dust particles are not dispersed overthe surface of the disk medium.

FIG. 9B shows the construction of a head slider 152 according to asecond example of the fifth embodiment of the present invention. Thisexample differs from the head slider 151 according to the first exampleof the fifth embodiment only in that the porous polymer member 59 isaccommodated within a recessed portion formed by removing part of theend face of the slider base 50 at the air outlet end thereof in athickness direction of the slider base 50. Since the remaining portionsof the construction of the head slider 152 are identical with theconstruction of the head slider 151 according to the first example ofthe fifth embodiment, like reference numerals are imparted to likeconstituent members, and the description thereof will be omitted.

FIG. 9C shows the construction of a head slider 153 according to a thirdexample of the fifth embodiment. This example differs from the headslider 151 according to the first example of the fifth embodiment onlyin that the porous polymer member 59 is accommodated within a recessedportion formed by removing part of the surface of the slider base 50 atthe air outlet end from the air outlet end toward the air inlet end.Since the remaining portions of the construction of the head slider 153remain the same as the construction of the head slider 151 according tothe first example of the fifth embodiment, like reference numerals areimparted to like constituent members, and the description thereof willbe omitted.

Thus, as dust particles flowing out from the air outlet end of theslider base 50 are allowed to be forcibly trapped by the porous polymermember 59 without adhering to the end surface 58 of the slider base 50which has the water repellency by providing the porous polymer member 59at the air outlet end of the slider base 50, no dust particles adhere tothe disk medium, whereby the contact of dust particles with the headslider is prevented, thereby making it difficult for a head crash tooccur.

In addition, this porous polymer member 59 can be attached to all thehead sliders according to the first to fourth embodiments, and whenattached, the contact of dust particles with the head sliders isprevented, thereby making it difficult for a head crash to occur.

The first to fifth embodiments that have been described heretofore areeach constructed such that the water repellency is imparted to the endsurface of the head slider so that no dust particles adhere to the headslider. Sixth to fifteenth embodiments that will be described next areeach constructed such that an air flow to an end surface 28 of a sliderbase 2 is improved by improving the first air bearing portion 31provided on the head slider in the first to fifth embodiments to therebydecrease further the adhesion of dust particles to the end surface 28.

Note that since the basic construction of head sliders that will bedescribed in the sixth to fifteenth embodiments is completely identicalwith the construction of the conventional head slider 1 described withreference to FIGS. 2A, 2B except for the shape of the first air bearingportion 31, like reference numerals are imparted to like constituentmembers, and the description thereof will be omitted. In addition, evenin the sixth to fifteenth embodiments, similar to the aforesaidembodiments, while a water repellent treatment can be provided to endsurfaces 18 of first to third land portions 21 to 23 and the end surface28 of the slider 2, as the modes for providing a water repellenttreatment have already been described before, the description of thewater repellency will be omitted here.

FIGS. 10A, 10B show the construction of a head slider 160 according to asixth embodiment of the present invention. In the head slider 160according to this embodiment, a ventilation groove 60 is formed thereinby longitudinally diagonally cutting out a central portion of a firstair bearing portion 31. The ventilation groove 60 of this embodiment isformed by cutting out the air bearing portion 31 to such an extent thatthe groove so cut reaches the end surface 18 of the first land portion21. In addition, confronting sides of the ventilation groove 60 are madeparallel to each other. The inclination angle of side walls of theventilation groove 60 may be matched to a direction in which air flowsin when the head slider 160 is situated at a specific position on a diskmedium, for example, at a CSS zone.

FIG. 11 shows, partially, the construction of a head slider 170according to a seventh embodiment of the present invention, and only amain part of the head slider 170 at an air inlet end thereof is shown inthe figure. In the head slider 170 according to this embodiment, acentral portion of a first air bearing portion 31 is cut out in alongitudinal direction of the head slider 170 so as to form aventilation groove 61. The ventilation groove 61 of this embodiment isformed by cutting out the first air bearing portion 31 to such an extentthat the groove so cut reaches an end surface 18 of a first land portion21. In addition, confronting sides of the ventilation groove 61 are madeparallel to each other.

FIG. 12 shows partially the construction of a head slider 180 accordingto an eighth embodiment of the present invention, and only a main partof the head slider 180 at an air inlet end thereof is shown in thefigure. In the head slider 180 of this embodiment, a central portion ofa first air bearing portion 31 is cut out in a longitudinal direction ofthe head slider 180 so as to form a ventilation groove 62. Theventilation groove 62 of this embodiment is formed by cutting out thefirst air bearing portion 31 to such a depth that the groove so cut doesnot reach an end surface 18 of the first land air bearing portion 21. Inaddition, confronting sides of the ventilation groove 62 are madeparallel to each other. The head slider 180 according to the eighthembodiment is such that the depth of the ventilation groove 61 in thehead slider 170 of the seventh embodiment is made shallower.

FIG. 13 shows partially the construction of a head slider 190 accordingto a ninth embodiment of the present invention, and only a main part ofthe head slider 190 at an air inlet end thereof is shown in the figure.In the head slider 190 of this embodiment, a central portion of a firstair bearing portion 31 is cut out along a longitudinal direction of thehead slider 190 so as to form a ventilation groove 63. The ventilationgroove 63 of this embodiment is formed by cutting out the first airbearing portion 31 to such a depth that the groove so cut does not reachan end surface 18 of a first land portion 21. In addition, confrontingsides of the ventilation groove 63 are made parallel with each other.The head slider 190 of the ninth embodiment is such that the depth ofthe ventilation groove 62 of the head slider 180 of the eighthembodiment is made gradually deeper along a direction in which airflows.

FIG. 14 shows, partially, the construction of a head slider 200according to a tenth embodiment of the present invention, and only amain part of the head slider 200 at an air inlet end thereof is shown inthe figure. In the head slider 200 according to this embodiment, inorder to form a ventilation groove 64, a central portion of a first airbearing portion 31 is cut out in a longitudinal direction of the headslider 200 in such a manner that the width of ventilation groove 64expands gradually toward an air outlet end of the first air bearingportion 31. The ventilation groove 64 of this embodiment is such thatthe first air bearing portion 31 is cut out to such an extent that thegroove so cut reaches an end surface 18 of a first land portion 21. Inaddition, sides of the ventilation groove 64 are caused to expandtransversely and linearly as they extend in a direction in which airflows.

FIG. 15 shows partially the construction of a head slider 210 accordingto an eleventh embodiment of the present invention, and only a main partof the head slider 210 at an air inlet end thereof is shown in thefigure. In the head slider 210 of this embodiment, in order to form aventilation groove 65, a central portion of a first air bearing portion31 is cut out in a longitudinal direction of the head slider 210 in sucha manner that the width of the ventilation groove expands gradually incurved fashion toward an air outlet end of the first air bearing portion31. The ventilation groove 65 of this embodiment is such that the firstair bearing portion 31 is cut out to such an extent that the ventilationgroove so cut reaches an end surface 18 of a first land portion 21. Inaddition, a width between sides of the ventilation groove 65 is made toexpand smoothly and transversely as it extends in a direction in whichair flows.

FIG. 16 shows, partially, the construction of a head slider 220according to a twelfth embodiment of the present invention, and only amain part of the head slider 220 at an air inlet end thereof is shown inthe figure. In the head slider 220 of this embodiment, in order to forma ventilation groove 66, a central portion of a first air bearingportion 31 is cut out in a longitudinal direction of the head slider 220in such a manner that the ventilation groove tapers. The ventilationgroove 66 of this embodiment is formed by cutting out the first airbearing portion 31 to such an extent that the groove so cut reaches anend surface 18 of a first land portion 21. In addition, a width betweensides of the ventilation groove 66 is made to contract linearlygradually as it extends in a direction in which air flows.

FIG. 17 shows the construction of a head slider 230 according to athirteenth embodiment of the present invention, as well as the basis ofthe construction. In the head slider 230 according to this embodiment,in order to form a ventilation groove 67, a central portion of a firstair bearing is cut out in a longitudinal direction of the head slider230 in such a manner that the width of the ventilation groove expandsgradually toward an air outlet end of the first air bearing portion 31.The ventilation groove 67 of this embodiment is such that the first airbearing portion 31 is cut out to such an extent that the groove so cutreaches an end surface 18 of a first land portion 21. The configurationof a side of the ventilation groove 67 of this embodiment, which facesan outer circumferential side of a disk medium 8, is such as to follow adirection S of an air flow when a carriage 16, driven by a voice coilmotor 17, is situated on an outer circumferential side of the diskmedium 8. In addition, the configuration of a side of the ventilationgroove 67 of this embodiment which faces an inner circumferential sideof the disk medium 8 is such as to follow a direction N of an air flowwhen the carriage 16 is situated on an inner circumferential side of thedisk medium 8.

FIG. 18 shows, partially, the construction of a head slider 240according to a fourteenth embodiment of the present invention, and onlya main part of the head slider 240 on an air inlet end thereof is shownin the figure. In the head slider 240 of this embodiment, centralportions of a first air bearing portion 31 are cut out along alongitudinal direction of the head slider 240 so as to form twoventilation grooves 68A, 68B. The ventilation grooves 68A, 68B of thisembodiment are formed by cutting the central portions of the first airbearing portion 31 to such an extent that the grooves so cut reach anend surface 18 of a first land portion 21. In addition, confrontingsides of the ventilation grooves 68A, 68B are made parallel to oneanother.

FIG. 19 shows partially the construction of a head slider 250 accordingto a fifteenth embodiment of the present invention, and only a main partof the head slider 250 at an air inlet end thereof is shown in thefigure. In the slider head 250 of this embodiment, central portions of afirst air bearing portions are cut out along a longitudinal direction ofthe head slider 250 so as to form three ventilation grooves 69A, 69B,and 69C. The ventilation grooves 69A to 69C of this embodiment areformed by cutting out the first air bearing portion 31 to such an extentthat the grooves so cut reach an end surface 18 of a first land portion21. In addition, confronting sides of the ventilation grooves 69A to 69Care made parallel to one another.

Thus, while the constructions of the head sliders according to the sixthto fifteenth embodiments have been described heretofore, with the headslider of any of the embodiments so described, air is allowed to flow tothe end surface 28 of the slider base 2 smoothly, and as a result, theadhesion of dust particles to the end surface 28 can be suppressed andthe adsorption failure of the head slider can be prevented effectively,while the vacuum effect, by virtue of the air flow over the end surface28, is maintained. In addition, the configurations of the ventilationgrooves formed in the first air bearing portion 31 of the head slider 2according to the embodiments of the present invention are not limited tothose disclosed in the embodiments.

FIG. 20 shows the construction of a cleaning mechanism for removing dirton a head slider 1 of a disk drive according to the present invention. Acleaning mechanism 70 comprises a guide bar 71, a holding member 72having a guide slope 73 provided thereon, and a dirt wiping roller 76attached to a rotating shaft 75 of a motor 74. The guide bar 71 isprovided at a free end portion of the head slider 1 attached to a headsuspension held on a carriage in such a manner as to protrude therefrom.The holding member 72 is situated outside an outer circumferentialportion of a disk medium 8, and the slope 73 is provided on a diskmedium side thereof. The dirt wiping roller 76 is situated in thevicinity of the holding member 72 and is driven to rotate by the motor74 when the head slider 1 is fixed by the holding member 72 so as toremove the dirt on an end surface of the slider base 2 of the headslider 1. The motor 74 and the dirt wiping roller 76 are adapted to moverelative to the head slider 1 so fixed.

Referring to FIGS. 21A to 21D, the operation of the cleaning mechanism70 of the head slider 1, which is constructed as has been describedabove, will be described below. FIG. 21A illustrates a state in whichthe head slider 1 is situated above the disk medium 8 so as to performreading from or writing to the disk medium 8. In this state, the dirtwiping roller 76 does not rotate.

When the head slider 1 is moved radially outwardly to the outercircumference of the disk medium 8 from this state, as shown in FIG.21B, the guide bar 71 provided on the head slider 1 in such a state asto protrude therefrom, rides on the guide slope 73 of the holding member72. When the head slider 1 is moved further in the same radially outwarddirection of the disk medium 8 from this state, the guide bar 71provided on the head slider 1 in such a manner as to protrude therefromthen rides on a flat portion of the holding member 72, leading to astate shown in FIG. 21C. A state shown in FIG. 21D is the state shown in21C as viewed from the outside of the disk medium 8. The positions shownin FIGS. 21C, 21D are where the end surface of the head slider 1 iscleaned.

When the head slider 1 is held by the holding member 72 in a manner ashas been described above, the motor 74 and the dirt wiping roller 76 aremoved, and when the dirt wiping roller 76 comes into contact with theend surface of the head slider 1, the dirt wiping roller 76 is caused torotate by the motor 74. Then, when the dirt wiping roller 76 is moved ina direction indicated by an arrow T in FIG. 21D, the end surface of thehead slider 1 is cleaned by the dirt wiping roller 76 at the cleaningposition.

Described next will be a method for providing a water repellenttreatment to the end surface of the head sliders described in the firstto fifth embodiments of the present invention.

Incidentally, as is seen from the above-described embodiments, most ofthe pads for reducing the stationary friction force between the headslider and the disk medium are provided at the air inlet end of the headslider, and in many cases few pads are provided on the air outlet end ofthe head slider. As this occurs, there may be a risk that the endsurface of the head slider comes into contact with the disk medium.Then, as this happens, lubricant enters between the end surface of thehead slider and the disk medium to thereby cause bridging, leading to arisk that the head slider is adsorbed to the disk medium. To eliminatesuch a fault, part of a protection film (DLC (diamond-like carbon))provided on the end surface of the head slider may be grooved so as toform a groove portion. Even in case the disk medium rotates in a reversedirection, whereby the head slider is adsorbed to the disk medium, theadhesion of lubricant to the end surface of the head slider issuppressed by the groove portion so formed, the adsorption of the headslider to the disk medium being thereby prevented.

The method for providing a water repellent treatment according to thepresent invention is effective not only to the head slider 1 in whichthe groove is formed in the protection film (hereinafter, referred to asDLC) but also to a head slider 1 in which no groove is formed in theDLC.

Thus, a conventional method and a method according to the presentinvention for providing a water repellent treatment to the end surfaceof a head slider 1 will be described first and, then, a conventionalmethod and a method according to the present invention for providing awater treatment to the end surface of a head slider 1 in which no grooveis formed in the DLC.

FIG. 22 is a process diagram explaining the steps of a conventionalmethod for providing a water repellent treatment to the end surface of ahead slider in which a groove is formed in the surface of a DLC 24. Notethat here will be described a method for providing a water repellenttreatment to the end surface of the head slider 1 described withreference to FIGS. 2A, 2B in which the land portions 21 to 23(hereinafter, referred collectively to as the land 20) and the airbearing portions 31 to 33 (hereinafter, referred collectively to as theair bearing 30) are provided on the slider base 2. In addition, theillustration and description of a process for forming the pads 5 areomitted here.

In step 1, a resist R is first applied to the full surface of the sliderbase 2 of altic (AlTiC) on the surface of which patterns of silicone(Si) and DLC are applied, and after a metal mask is applied to theresist from thereabove, the slider base 2 is exposed to light so thatthe resist R is left as required.

In step 2, etching is provided to the slider base 2 in this state, sothat other portions on the slider base 2 than those on which the resistR is formed are recessed by a step. Etching used at this time is etchingutilizing oxygen plasma and CF4 for forming patterns of DLC 24.

In step 3, the resist R is separated. Areas that have appeared then havethe same height as the height of the surface of the air bearing 30 thatwill be described later.

In step 4, portions corresponding to the air bearing 30 are covered witha resist R so as to form the air bearing 30, or so-called resistpatterning is performed.

In step 5, etching is performed in this state. This etching is carriedout in order to form the air bearing 30.

In step 6, the resist is separated, so that the air bearing 30 isexposed.

In step 7, in order to form the land 20, resist patterning is carriedout in which portions corresponding to the land 20 are covered with aresist R.

In step 8, etching is provided in this state, so that the slider base 2is recessed by another step.

In step 9, the resist R is separated. The portions where the resistremains constitute the air bearing 30, and the recessed portionsconstitute the end surface 28 of the slider base.

In step 10, a fluorinating treatment (fluorination) is provided fully tothe end surface 28 of the slider base so as to provide a low waterrepellency to the end surface 28 of the slider base uniformly. Etchingused at this time is argon etching performed in a gaseous atmospherecontaining fluorine.

Since fluorine molecules remain slightly on the end surface 28 of theslider base, in its entirety, by the process as has been describedheretofore, the end surface 28 of the conventional slider base isprovided with a slight water repellency in its entirety.

Next, a method for providing a water repellent treatment to the endsurface of the slider base according to the first embodiment of thepresent invention will be described with reference to FIG. 23. A methodfor providing a water repellent treatment to the end surface of theslider base according to the first embodiment of the present inventionthat will be described here is a method for providing a two-stage waterrepellent treatment to the flying surface of the head slider 112according to the second example of the first embodiment of the presentinvention which is described with reference to FIG. 4 in which the waterrepellency differs at the air bearing 30 and the other locations.

In addition, as the processes from step 1 to step 4 of the method forproviding a water repellent treatment to the flying surface of the headslider 12 according to the first embodiment of the present invention isidentical with the processes from step 1 to step 4 of the conventionalmethod for providing a water repellent treatment that is described withreference to FIG. 22, the illustration and description of the processesfrom step 1 to step 4 will be omitted.

In the method for providing a water repellent treatment to the flyingsurface of the head slider 112 according to the first embodiment of thepresent invention, in performing the etching in the conventional step 5,a step 5′ is implemented to simultaneously provide a fluorinatingtreatment. As a result, a fluorination providing a water repellency isprovided to the end surface of the portions which constitute the land20.

Following this, as is the case with the conventional example, processesfrom step 6 to step 8 are implemented, and after the slider base 2 isrecessed by another step through the etching in step 8, a step X isimplemented. In this step X, a fluorinating treatment is provided. Afluorination providing a water repellency is provided to the portions ofthe slider base 2 which are not covered with the resist R. Thereafter,according to the method for providing a water repellent treatment to theend surface of the slider base according to the first embodiment of thepresent invention, the steps 9 and 10 of the conventional waterrepellent treatment providing method are implemented.

Thus, according to the method for providing a water repellent treatmentto the flying surface of the head slider 112 according to the firstembodiment of the present invention, a fluorination is implemented instep 5′ which replaces the conventional step 5, and a step X ofimplementing a fluorination is added between the steps 8 and 9. As aresult, the land 20 is subjected to fluorination twice in steps 5 and10, and the end surface 28 of the slider base is subjected tofluorination twice in steps X and 10 and, therefore, the waterrepellency of both the land 20 and the end surface 28 of the slider basebecomes higher than that of the air bearing 30.

In addition, in the conventional step 5, if no fluorination isimplemented, the water repellency is increased higher only at the endsurface 28 of the slider base when compared with those at the land 20and the air bearing 30, and in case the fluorination in step X is madestronger than the fluorination in step 5′, the water repellency on theflying surface of the head slider is allowed to increase as it movesfrom the air bearing 30, then to the land 20 and finally to the endsurface 28 of the slider base in that order.

While the water repellency has been provided heretofore to the entiretyof the flying surface side of the head slider by performing afluorination, a head device exists on the flying surface, and there hasbeen a risk that the head device may fail should too strong afluorination be provided to the flying surface. Consequently, anexcessively strong fluorination has not been implemented. On the otherhand, according to the present invention, in order to increase the waterrepellency of the other portions of the flying surface other than theend surfaces of the air bearing portion and the land portion, with theend surface of the air bearing portion including the portion where thehead device is provided or the end surfaces of the air bearing portionand the land portion being covered with the resist, a fluorination isprovided to the remaining portions. As a result, as the portion wherethe head device exists only has to be fluorinated once, as is done inthe conventional manner, there exists no risk that the head devicefails.

In a case where a water repellent treatment is provided in such a mannerthat the water repellency varies over the end surface 28 of the sliderbase, as has been done to the head sliders 132 and 142 according to theembodiments which are described with reference to FIGS. 6B and 8A, thenumber of times of applying the resist may be increased depending uponthe number of differences in degree of water repellency.

Referring to FIG. 23, a method for providing a water repellent treatmentto the end surface of the slider base according to the second embodimentof the present invention will be described next. FIG. 24 is a processdiagram explaining the steps of the method for providing a waterrepellent treatment to the end surface of the slider base according tothe second embodiment of the present invention that is used to provideda water repellent treatment to the end surface of the head slider. Notethat here will be described a method for providing a water repellenttreatment in two stages in order to vary the water repellency betweenthe air bearing 30 and the other portions on the flying surface of thehead slider 112 described with reference to FIGS. 4A, 4B. In addition,the illustration and description of the process of forming the pads 5are omitted here.

In step A, a resist is first applied to portions where air bearings areto be formed on the surface of the slider base 2 of AlTiC (altic) towhich patterns 24 of Si (silicone) and DLC (diamond-like carbon) areapplied.

In step B, etching is implemented using a reaction etching gascontaining fluorine such as CF₄. This etching is generally referred toas RIE (Reactive on-Etching). By using this etching process, the airbearing 30 is formed and the water repellency is provided to the otherportions than the air bearing 30.

In step C, the resist of the air bearing 30 is separated.

In step D, a resist R is overlaid on the air bearing 30 and the land soas to cover them. As this occurs, the DLC patterns 24 are also coveredwith the resist.

In step E, the land 20 and the end surface 28 of the slider base areformed through etching.

In step F, the resist R over the land 20 and the air bearing 30 isseparated.

In step G, a resist R is overlaid on the air bearing 30 and the land 20so as to cover them except for part of the air bearing 30, or aso-called resist pattering is performed.

In step H, etching using oxygen plasma and CF4 is implemented. In thisetching, fluorination is implemented at the same time. Due to this, partof the DLC 24 is removed at the same time as the fluorination is carriedout, and the end surface 28 of the slider base is fluorinated. Namely,this etching has the same effect as fluorination.

In step I, the resist is separated.

In step J, a fluorination is applied to the entirety of the flyingsurface of the head slider.

As a result, while the end surface of the air bearing 30 is fluorinatedonce in step J, the land 20 is fluorinated twice in step B and step J,and the end surface 28 of the slider base is fluorinated twice in step Hand step J. Consequently, the water repellency on the flying surface ofthe head slider becomes similar to that of the head slider 112 shown inFIG. 4.

As this occurs, in case no fluorination is implemented in step B, thewater repellency is increased only on the end surface 28 of the sliderbase when compared with the land 20 and the air bearing 30, and in casethe fluorination in step H is made stronger than the fluorination instep B, the water repellency on the flying surface of the head slidercan be set so as to increase as it moves from the air baring 30, then tothe land 20 and finally to the end surface 28 of the slider base in thatorder.

In a case where a water repellent treatment is provided in such a mannerthat the water repellency varies over the end surface 28 of the sliderbase as has been done to the head sliders 132 and 142 according to theembodiments which are described with reference to FIGS. 6B and 8A, thenumber of times of applying the resist may be increased depending uponthe number of differences in degree of water repellency.

According to the method for providing a water repellent treatment to theend surface of the slider base according to the second embodiment of thepresent invention, the difference in degree of water repellency can beprovided through the 10 steps comprising steps A to J as is the casewith the method for providing a water repellent treatment to the endsurface of the conventional slider base which comprises 10 steps fromsteps 1 to 10. In addition, in order to vary the water repellency on theend surface of the slider base area by area, the number of times ofapplying a resist to the end surface of the slider base may be varied,so that only a fluorination may be applied to a portion where astrongest water repellency is desired to be provided with no resistbeing applied thereto.

FIG. 25 is a process diagram explaining the steps of a conventionalmethod for providing a water treatment to the surface of the head sliderwhen no groove is formed in the surface of the DLC 24. In the event thatno groove is formed in the surface of the DLC 24, steps 1 and 2 whichare described in FIG. 22 are not necessary, and hence the waterrepellent treatment is initiated from step 3.

In step 3, a DLC 24 is laminated on the end surface of the slider base2.

In step 4, resist patterning is implemented in which portionscorresponding to the air bearing 30 are covered with a resist R.

In step 5, etching is implemented so as to form the air bearing 30.

In step 6, the resist is separated so as to allow the air bearing 30 tobe exposed.

In step 7, resist patterning is implemented in which portionscorresponding to the land 20 are covered with a resist R.

In step 8, etching is implemented so as to allow the slider base 2 to berecessed by another step.

In step 9, the resist R is separated so as to form the land 20 and theend surface 28 of the slider base.

In step 10, a fluorination is provided to the entirety of the endsurface 28 of the slider base so as to provide a low water repellencyuniformly over the end surface 28 of the slider base. Etching that isimplemented at this moment is argon etching which is implemented in agaseous atmosphere containing fluorine.

The conventional slider base 2 provided with a slight water repellencyover the entirety of the end surface 28 thereof can be produced throughthe steps described heretofore.

Here, referring to FIG. 26, a method will be described for providing awater repellent treatment to the end surface of the slider according tothe present invention in a case where no groove is formed in the surfaceof the DLC 24. A water repellent treatment method of the presentinvention which will be described here is a modified example to themethod for providing a water repellent treatment to the end surface ofthe slider base according to the first embodiment that is described withreference to FIG. 23, which is a method for providing a water repellenttreatment in two stages to the flying surface of the slider base 112according to the second example of the first embodiment of the presentinvention in which the water repellency is made to differ at the airbearing 30 and the other locations of the flying surface. Here, too,like step numerals are given to steps like to those of the conventionalwater repellent treatment method for the description of the two-stagewater repellent treatment method.

Processes in steps 3 and 4 are similar to the processes of theconventional water repellent treatment method described with referenceto FIG. 25.

In step 5′, in etching in the conventional step 5, a step 5′ ofimplementing a fluorination at the same time is executed so as toimplement a fluorination providing a water repellency to the end surfaceof a portion constituting the land 20.

Processes in steps 6 to 8 are identical to those of the conventionalmethod.

In step X which follows step 8, fluorination is implemented. Throughthis fluorinating treatment fluorination is implemented so as to providea water repellency to portions of the slider base 2 which are notcovered with the resist R.

Processes in steps 9 and 10 are identical to those of the conventionalwater repellent treatment method.

Thus, even in the water repellent treatment method shown in FIG. 26, asin the case with the method for providing a water repellent treatment tothe flying surface of the head slider 112 according to the firstembodiment of the present invention which is described with reference toFIG. 23, the fluorination is implemented in step 5′ which replaces theconventional step 5, and another fluorination is implemented in step Xinterposed between steps 8 and 9. As a result, as the land 20 isfluorinated twice in steps 5 and 10 and the end surface 28 of the sliderbase is fluorinated twice in steps X and 10, the water repellency ofboth the land 20 and the end surface 28 of the slider base becomeshigher than that of the air bearing 30. Consequently, the methodaccording to the present invention can also be applied effectively evenin the event that no groove is formed in the surface of the DLC 24.

Note that while the above embodiments describe the head sliders in whichthe two flying rails and the land portion are provided on the sliderbase and in which the three air bearing portions and the three landportions are provided, no specific limitation is imposed to the numberand shape of air bearings and lands.

Industrial Field of Application

According to the head sliders and the disk drive employing the same headsliders, and the methods for providing a water repellent treatment tothe head sliders that have been disclosed in the present invention, theadhesion of dust particles to the flying surface confronting a disk ofthe head slider in the disk drive when the head slider flies can besuppressed, whereby the reliability of the disk drive can be improved.

1. A head slider comprising: a plurality of flat steps formed at an airinlet end of a flying surface of said head slider accessing a diskmedium, said steps facing said disk medium in such a manner as to bestepped gradually from a slider base and a vacuum area formed on saidflying surface of said head slider which faces said disk medium at adownstream end of an air flow flowing through said steps, wherein awater repellency provided to the step having the longest distance fromsaid slider base is decreased lower than the water repellencies providedto other portions of said flying surface. 2-7. (canceled)
 8. A headslider as set forth in claim 1, in which said plurality of stepscomprise a first step and a second step formed on a side which allowssaid second step to be closer by one step to said disk medium than saidfirst step, in which both end portions of said first step are caused toextend toward a downstream side of air flow so as to form rail portions,in which a land portion comprising a plurality of flat steps formed insuch a manner as to go away gradually from said slider base is formedfurther at a downstream end of each of said rail portions, and in whicha distance from said slider base to a third step which is the step ofsaid plurality of steps formed on each of the land portions which issituated closest to said disk medium is equal to a distance from saidslider base to said second step, wherein a water repellency provided tosaid second and third steps can be decreased lower than waterrepellencies provided to other portions of said flying surface.
 9. Ahead slider as set forth in claim 1, in which at least a land portion isprovided on a flying surface of said head slider accessing a disk mediumfor forming said vacuum area and in which said land portion comprises atleast a flat step formed thereon in such a manner as to be graduallycloser to said disk medium than a slider base, wherein waterrepellencies provided to other portions of said flying surface areincreased higher than a water repellency provided to said step situatedat a position having a longest distance from said slider base.
 10. Ahead slider as set forth in claim 8, wherein said water repellenciesprovided to said other portions of said flying surface are made toincrease as said portions come closer to said slider base.
 11. A headslider as set forth in claim 8, wherein the water repellencies on thesurface of said base is made to vary from the air inlet end to the airoutlet end such that the water repellency becomes higher toward theinlet end and becomes lower toward the air outlet end.
 12. A head slideras set forth in claim 8, wherein the water repellency at said vacuumgenerating area is made to become higher at an area where the vacuumforce becomes higher. 13-17. (canceled)
 18. A method for providing awater repellent treatment to a head slider as set forth in claim 8,wherein informing said steps using a photolithography technique,immediately after said vacuum generating area is formed with an ionmill, a water repellent treatment is provided to the surface of saidhead slider with an RIW utilizing a fluorine reaction gas in a state inwhich a shielding resist is left as required.
 19. A method for providinga water repellent treatment to a head slider as set forth in claim 8 inwhich a protection film is provided on said steps and in which part ofsaid protection film is removed using the photolithography technique,wherein a water repellent treatment is provided to other portions ofsaid head slider than a step having a longest distance from said sliderbase at the same time as part of said protection film is removed with anRIE using a fluorine reaction gas.
 20. A method for providing a waterrepellent treatment to the head slider as set forth in claim 19,comprising the steps of; applying a resist to portions where an airbearing is to be formed on the surface of said slider base on which aprotection film is formed; implementing etching using an etching gascontaining fluorine not only to form an air bearing but also to providea water repellency to portions other than said air bearing so formed;separating the resist on said air bearing; applying a resist so as tocover said air bearing and a portion where a land is formed on saidslider base; forming a land and an end surface of said slider basethrough etching; separating the resist on said land and said airbearing; applying a resist for covering said air bearing and said landexcept for part of said air bearing; implementing etching by oxygenplasma etching and CF4 etching which includes a fluorination not only toremove part of said protection film but also to provide a fluorinationto said end surface of said slider base; and applying a fluorination tothe entirety of a flying surface of said head slider.